• Vacuum Assisted Process Device
• Oxide nanoparticles
• Carbonyl Powder, Fe, Ni, Alloy
• Metal Nanoparticles
• Precious Metal Nanoparticles
• Carbide nanoparticles
• Nitride nanoparticles
• Nanodiamonds
• SOFC Materials
• SOFC Components
• Aerospace Epoxy Adhesives
• Advanced Materials
• Precious metal compounds
• Special Catalysts
• Nanofibers by Electrospinning
• High purity chemicals

• Loaded with 360o rotatable 3D substrate base increasing the surface area of test material by 4 times. It is able to produce 4 samples of required conditions in just 1 process while maintaining original vacuum environment. It is very convenient to adjust the thickness of finished film and evaporation volume.
• Observe the making process of test material. When performing vacuum coating from 3 directions, user can rotate the base while coating and thereby coat the 3 sides at the same time, and is also able to carry out clear SEM 3-D observation.
• Flexible use of rotating base can avoid the variation of radiant heat in film thickness sensor caused by the opening and closing of evaporation source and thereby offer precise measure of film thickness. In theory, the thickness data displayed on monitor is sensitive to the temperature difference of sensor. The moment shutter of evaporation source opens or closes, there is a variation of radiant heat in the sensor of high-temperature evaporation crucible, so a display is different from actual thickness data. In the case of rotating base, the shutter is set to its constantly open status from the start and the temperature of evaporation crucible drives the rotation of 3D support in balanced state, so that deposition of base can be performed from start to end without making any difference to the radiant heat of sensor.

Main components

• High-voluum exhaust device (whirlpool pump + air pump
• 2 evaporation sources
• Crystal vibration sub-film monitor
• 4 rotatable 3D base support