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Carbon Nanotube Production Device by Chemical Vapor Deposition_CVD1203


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  • 3 independent temperature adjustors are applied to control the temperature at different positions of quartz tube furnace. A quartz tube furnace of large caliber(120mmφ) is applicable to production of carbon nanotube on a large substrate and mass production of common CNTs powders.
  • A precise flow control system can precisely control the import volume of hydrocarbon gas; evaporation device can import ethanol into the device.
  • Equipped with external import device of catalyzer or carrier, receiving device of CNTs, and helix rotary device inside quartz tube to embody continuous or intermittent creation of CNTs.
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Basic Technical Parameters
Tube furnace
  • Working temperature 400~1100℃
  • Length of tube with even heating: 250mm
  • Temperature control: 3 temperature adjustor
  • External dimension: W940×H810×D510mm
  • External diameter of heating tube: 120mm φ
  • Breaker capacity: AC200 30A 3-phase
  • Weight: 165kg
Furnace tube
  • Dimension: 120φ×L1400mm;
  • Import tube: 1/2 tube 2pcs
Gas control
  • Gas combination flow meter
  • Gas type N2/H2/CH4 (replaceable)
[CNT composition] liquid fuel import
[CMC composition] co-catalyst import
  • Matrass,
  • Gasification heater,
  • Import tube
Import of catalyzer precursor
  • Test tube,
  • Sublimation heater,
  • Import tube
Vocuum meter
  • Vacuum meter of low-noise tube
Exhaust pump
  • Rotary pump
Made in Tsukuba Japan
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